Shallow buried SiN[sub x] layers
Barbadillo, L., Hernández, M. J., Cervera, M., Rodrı́guez, P., Piqueras, J.Volume:
87
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.373520
File:
PDF, 300 KB
english, 2000