A modification to the Sigmund model of ion sputtering

A modification to the Sigmund model of ion sputtering

Mark Bradley, R., Hofsäss, Hans
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Volume:
116
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4904438
Date:
December, 2014
File:
PDF, 472 KB
english, 2014
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