Deposition of Charged Particles on a Flat Plate in Parallel Flow in the Presence of an Electric Field
Handol Lee,, Se-Jin Yook,, Kwan-Soo Lee,Volume:
27
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2014.2300493
Date:
May, 2014
File:
PDF, 5.47 MB
english, 2014