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Significance of coating stress on substrate bow in large area processing of MCM
Kwanho Yang,, Jang-Hi Im,, Heistand, R.H.Volume:
24
Language:
english
Journal:
IEEE Transactions on Advanced Packaging
DOI:
10.1109/6040.909622
Date:
January, 2001
File:
PDF, 70 KB
english, 2001