Significance of coating stress on substrate bow in large...

IEEE Transactions on Advanced Packaging 2001 / Feb. Vol. 24; Iss. 1

Significance of coating stress on substrate bow in large area processing of MCM

Kwanho Yang,, Jang-Hi Im,, Heistand, R.H.
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Volume:
24
Language:
english
Journal:
IEEE Transactions on Advanced Packaging
DOI:
10.1109/6040.909622
Date:
January, 2001
File:
PDF, 70 KB
english, 2001
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