Direct deposition of SrBi 2 Ta...

Integrated Ferroelectrics 1999 / 10 Vol. 26; Iss. 1-4

Direct deposition of SrBi 2 Ta 2 O 9 Film on IrO 2 electrode using liquid source CVD method

Eshita, Takashi, Yamawaki, Hideki, Miyagaki, Shinji, Arimoto, Yoshihiro
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Volume:
26
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589908215615
Date:
October, 1999
File:
PDF, 242 KB
english, 1999
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