Improving the accuracy and efficiency of junction...

IEEE Transactions on Semiconductor Manufacturing 2003 / 05 Vol. 16; Iss. 2

Improving the accuracy and efficiency of junction capacitance characterization: strategies for probing configuration and data set size

MacSweeney, D., McCarthy, K.G., Floyd, L., Duane, R., Hurley, P., Power, J.A., Kelly, S.C., Mathewson, A.
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Volume:
16
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2003.811577
Date:
May, 2003
File:
PDF, 566 KB
english, 2003
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