Contact Resistance Reduction to FinFET Source/Drain Using Novel Dielectric Dipole Schottky Barrier Height Modulation Method
Coss, Brian E., Smith, Casey, Loh, Wei-Yip, Majhi, Prashant, Wallace, Robert M., Kim, Jiyoung, Jammy, RajVolume:
32
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2011.2148091
Date:
July, 2011
File:
PDF, 406 KB
english, 2011