A Long Stroke Electromagnetic $XY$ Positioning Stage for...

IEEE/ASME Transactions on Mechatronics 2012 / 10 Vol. 17; Iss. 5

A Long Stroke Electromagnetic $XY$ Positioning Stage for Micro Applications

Khan, Muneeb Ullah, Bencheikh, Nabil, Prelle, Christine, Lamarque, Frédéric, Beutel, Tobias, Buttgenbach, Stephanus
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Volume:
17
Language:
english
Journal:
IEEE/ASME Transactions on Mechatronics
DOI:
10.1109/tmech.2011.2142319
Date:
October, 2012
File:
PDF, 1.63 MB
english, 2012
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