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Fabrication of high-aspect-ratio ceramic microstructures by injection molding with the altered lost mold technique
Ren-Haw Chen,, Chih-Lung Lan,Volume:
10
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.911093
Date:
March, 2001
File:
PDF, 143 KB
english, 2001