Hydrogenated amorphous silicon thin-film transistor arrays...

IEEE Electron Device Letters 2003 / 09 Vol. 24; Iss. 9

Hydrogenated amorphous silicon thin-film transistor arrays fabricated by digital lithography

Wong, W.S., Ready, S.E., Jeng-Ping Lu,, Street, R.A.
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Volume:
24
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2003.815939
Date:
September, 2003
File:
PDF, 1001 KB
english, 2003
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