Characteristics and mechanism of tunable work function gate...

IEEE Electron Device Letters 2005 / 07 Vol. 26; Iss. 7

Characteristics and mechanism of tunable work function gate electrodes using a bilayer metal structure on SiO/sub 2/ and HfO/sub 2/

Ching-Huang Lu,, Wong, G.M.T., Deal, M.D., Tsai, W., Majhi, P., Chi On Chui,, Visokay, M.R., Chambers, J.J., Colombo, L., Clemens, B.M., Nishi, Y.
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Volume:
26
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2005.851232
Date:
July, 2005
File:
PDF, 171 KB
english, 2005
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