High-density MIM capacitors using AlTaOx dielectrics

IEEE Electron Device Letters 2003 / 05 Vol. 24; Iss. 5

High-density MIM capacitors using AlTaOx dielectrics

Yang, M.Y., Huang, C.H., Chin, A., Chunxiang Zhu,, Li, M.F., Dim-Lee Kwong,
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Volume:
24
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2003.812572
Date:
May, 2003
File:
PDF, 285 KB
english, 2003
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