![](/img/cover-not-exists.png)
Single-wafer polysilicon engineering for the improvement of over erase in a 0.18-μm floating-gate flash memory
Luoh, T., Tzung-Ting Han,, Yun-Chi Yang,, Kuang-Chao Chen,, Hsueh-Hao Shih,, Yaw-Lin Hwang,, Cheng-Chen Hsueh,, Chung, H., Pan, S., Chih-Yuan Lu,Volume:
16
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2003.810937
Date:
May, 2003
File:
PDF, 2.13 MB
english, 2003