30-nm recessed S/D SOI MOSFET with an ultrathin body and a...

IEEE Electron Device Letters 2005 / 07 Vol. 26; Iss. 7

30-nm recessed S/D SOI MOSFET with an ultrathin body and a low SDE resistance

Chang-Geun Ahn,, Won-Ju Cho,, Kiju Im,, Jong-Heon Yang,, In-Bok Baek,, Sungkweon Baek,, Seongjae Lee,
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Volume:
26
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2005.851183
Date:
July, 2005
File:
PDF, 355 KB
english, 2005
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