Applications of single-wafer rapid-thermal processing to...

IEEE Transactions on Semiconductor Manufacturing 2003 / 05 Vol. 16; Iss. 2

Applications of single-wafer rapid-thermal processing to the manufacture of advanced flash memory

Kuang-Chao Chen,, Hsueh-Hao Shih,, Yaw-Lin Hwang,, Cheng-Chen Hsueh,, Chung, H., Pan, S., Chih-Yuan Lu,
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Volume:
16
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2003.810942
Date:
May, 2003
File:
PDF, 1.18 MB
english, 2003
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