Electrical Performance Enhancement of Al–Zn-Sn–O Thin Film...

IEEE Electron Device Letters 2013 / 09 Vol. 34; Iss. 9

Electrical Performance Enhancement of Al–Zn-Sn–O Thin Film Transistor by Supercritical Fluid Treatment

Teng, Li-Feng, Liu, Po-Tsun, Wang, Wei-Ya
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Volume:
34
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2013.2272117
Date:
September, 2013
File:
PDF, 497 KB
english, 2013
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