Improved independent gate N-type FinFET fabrication and characterization
Fried, D.M., Duster, J.S., Kornegay, K.T.Volume:
24
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2003.815946
Date:
September, 2003
File:
PDF, 302 KB
english, 2003