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Effect of initial process conditions on the structural properties of AlN films
Q.S. Paduano, D.W. Weyburne, J. Jasinski, Z. Liliental-WeberVolume:
261
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.jcrysgro.2003.11.017
File:
PDF, 454 KB
english, 2004