Deposition and characterization of zirconium tin titanate...

Journal of Crystal Growth 2004 Vol. 261; Iss. 2-3

Deposition and characterization of zirconium tin titanate thin films as a potential high-k material for electronic devices

E.L Mays, Dennis W Hess, William S Rees Jr
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Volume:
261
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.jcrysgro.2003.11.039
File:
PDF, 265 KB
english, 2004
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