Nitrogen plasma optimization for high-quality dilute nitrides
Mark A. Wistey, Seth R. Bank, Homan B. Yuen, Hopil Bae, James S. Harris Jr.Volume:
278
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2004.12.060
File:
PDF, 189 KB
english, 2005