Thick AlN layers grown by HVPE
O. Kovalenkov, V. Soukhoveev, V. Ivantsov, A. Usikov, V. DmitrievVolume:
281
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2005.03.054
File:
PDF, 391 KB
english, 2005