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High-speed epitaxial growth of AlN above by hydride vapor phase epitaxy
Toru Nagashima, Manabu Harada, Hiroyuki Yanagi, Yoshinao Kumagai, Akinori Koukitu, Kazuya TakadaVolume:
300
Year:
2007
Language:
english
Pages:
3
DOI:
10.1016/j.jcrysgro.2006.10.260
File:
PDF, 222 KB
english, 2007