Multilayer thin film capacitors by selective etching of Pt...

Microelectronic Engineering 2015 / 02 Vol. 133

Multilayer thin film capacitors by selective etching of Pt and Ru electrodes

Hamm, Steven C., Currano, Luke, Gangopadhyay, Shubhra
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Volume:
133
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.12.004
Date:
February, 2015
File:
PDF, 951 KB
english, 2015
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