Fabrication of nanostep for total internal reflection...

Microelectronic Engineering 2015 / 02 Vol. 133

Fabrication of nanostep for total internal reflection fluorescence microscopy to calibrate in water

Unno, Noriyuki, Maeda, Asao, Satake, Shin-ichi, Tsuji, Takahiro, Taniguchi, Jun
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Volume:
133
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.12.002
Date:
February, 2015
File:
PDF, 2.09 MB
english, 2015
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