In-situ etching of GaAs/AlxGa1−xAs by CBr4

In-situ etching of GaAs/AlxGa1−xAs by CBr4

Andre Maaßdorf, Markus Weyers
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Volume:
310
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.jcrysgro.2008.07.064
File:
PDF, 327 KB
english, 2008
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