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Height-selective etching for regrowth of self-aligned contacts using MBE
G.J. Burek, M.A. Wistey, U. Singisetti, A. Nelson, B.J. Thibeault, S.R. Bank, M.J.W. Rodwell, A.C. GossardVolume:
311
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.jcrysgro.2008.11.012
File:
PDF, 561 KB
english, 2009