Influence of substrate temperature on nitridation of (0 0 1) GaAs using RF-radical source
Shigeya Naritsuka, Midori Mori, Yoshitaka Takeuchi, Takahiro MaruyamaVolume:
311
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.jcrysgro.2009.01.070
File:
PDF, 501 KB
english, 2009