Industrial MEMS on SOI

Industrial MEMS on SOI

Renard, Stéphane
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Volume:
10
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/10/2/323
Date:
June, 2000
File:
PDF, 247 KB
english, 2000
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