Design, modeling and FEM-based simulations of a 1-DoF MEMS...

Microsystem Technologies 2015 / 10 Vol. 21; Iss. 10

Design, modeling and FEM-based simulations of a 1-DoF MEMS bulk micromachined piezoresistive accelerometer

Mukhiya, R., Gopal, R., Pant, B. D., Khanna, V. K., Bhattacharyya, T. K.
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Volume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2361-y
Date:
October, 2015
File:
PDF, 2.69 MB
english, 2015
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