Ion beam irradiation of nanostructures: sputtering, dopant...

Semiconductor Science and Technology 2015 / 03 Vol. 30; Iss. 3

Ion beam irradiation of nanostructures: sputtering, dopant incorporation, and dynamic annealing

Johannes, Andreas, Holland-Moritz, Henry, Ronning, Carsten
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Volume:
30
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/30/3/033001
Date:
March, 2015
File:
PDF, 2.05 MB
english, 2015
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