Technological solution for the automatic replacement of the...

Thin Solid Films 2015 / 01 Vol. 575

Technological solution for the automatic replacement of the catalytic filaments in HWCVD

Nos, O., Frigeri, P.A., Bertomeu, J.
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Volume:
575
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.10.010
Date:
January, 2015
File:
PDF, 487 KB
english, 2015
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