Volume 575

Thin Solid Films

Volume 575

1

Transportation of hydrogen radicals for cleaning extreme ultraviolet lithography optics

Kuroki, Yuya, Funakoshi, Naoto, Nishiyama, Iwao, Izumi, Akira

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 450 KB

english, 2015

2

Low temperature boron doping into crystalline silicon by boron-containing species generated in Cat-CVD apparatus

Ohta, Tatsunori, Koyama, Koichi, Ohdaira, Keisuke, Matsumura, Hideki

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 363 KB

english, 2015

3

Low surface recombination velocity in n-Si passivated by catalytic-chemical vapor deposited alumina films

Ogita, Yoh-Ichiro, Aizawa, Yotaro

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 651 KB

english, 2015

4

Formation of alumina film using alloy catalyzers in catalytic chemical vapor deposition

Ogita, Yoh-Ichiro, Saito, Naoyuki

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 1.25 MB

english, 2015

5

Post-nitriding on μc-InXGa1−XN films using hot-wire chemical vapor deposition technique

Ohashi, Fumitaka, Koiso, Sunao, Hibino, Shun, Sahashi, Tatsuro, Itoh, Takashi, Nonomura, Shuichi

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 806 KB

english, 2015

6

Dependence of the catalytic decomposition of PH3 on wire material

Umemoto, Hironobu

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 352 KB

english, 2015

7

Degradation of thin tungsten filaments at high temperature in HWCVD

Frigeri, P.A., Nos, O., Bertomeu, J.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 354 KB

english, 2015

8

Hetero- and homogeneous three-dimensional hierarchical tungsten oxide nanostructures by hot-wire chemical vapor deposition

Houweling, Z.S., Harks, P.-P.R.M.L., Kuang, Y., van der Werf, C.H.M., Geus, J.W., Schropp, R.E.I.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 1.58 MB

english, 2015

9

Study of the decomposition mechanism of PMMA-type polymers by hydrogen radicals

Arai, Yu, Noto, Yusuke, Goto, Yousuke, Takahashi, Seiji, Yamamoto, Masashi, Nishiyama, Takashi, Kono, Akihiko, Ishijima, Tatsuo, Ishikawa, Kenji, Hori, Masaru, Horibe, Hideo

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 653 KB

english, 2015

10

Using hot wire and initiated chemical vapor deposition for gas barrier thin film encapsulation

Spee, D.A., Rath, J.K., Schropp, R.E.I.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 1.08 MB

english, 2015

11

Dual hot-wire arrangement for the deposition of silicon and silicon carbide thin films

Chen, Tao, Bangalore Rajeeva, Bharath, Wolff, Johannes, Schmalen, Andreas, Finger, Friedhelm

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 650 KB

english, 2015

12

Carbon film deposition from high velocity rarefied flow

Rebrov, A.K., Emelyanov, A.A., Yudin, I.B.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 762 KB

english, 2015

13

Photo-stability of a-Si solar cells fabricated by “Liquid-Si printing method” and treated with catalytic generated atomic hydrogen

Murayama, Hiroko, Ohyama, Tatsushi, Yoshida, Isao, Terakawa, Akira, Masuda, Takashi, Ohdaira, Keisuke, Shimoda, Tatsuya

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 806 KB

english, 2015

14

Technological solution for the automatic replacement of the catalytic filaments in HWCVD

Nos, O., Frigeri, P.A., Bertomeu, J.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 487 KB

english, 2015

15

Editorial Board

Journal:

Thin Solid Films

Year:

2015

File:

PDF, 91 KB

2015

16

Gas-phase diagnoses in catalytic chemical vapor deposition (hot-wire CVD) processes

Umemoto, Hironobu

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 304 KB

english, 2015

17

Study of porogen removal by atomic hydrogen generated by hot wire chemical vapor deposition for the fabrication of advanced low-k thin films

Godavarthi, S., Wang, C., Verdonck, P., Matsumoto, Y., Koudriavtsev, I., Dutt, A., Tielens, H., Baklanov, M.R.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 764 KB

english, 2015

18

Estimation of activation energies for decomposition reaction of polymer by hydrogen radicals generated using hot-wire catalyzer

Kono, Akihiko, Arai, Yu, Goto, Yousuke, Yamamoto, Masashi, Takahashi, Seiji, Yamagishi, Tadaaki, Ishikawa, Kenji, Hori, Masaru, Horibe, Hideo

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 469 KB

english, 2015

19

Passivation study of multi-crystalline silicon wafer with i-a-Si:H layer deposited by HWCVD

Agarwal, Mohit, Dusane, R.O.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 440 KB

english, 2015

20

Reduction of surface recombination velocity by rapid thermal annealing of p-Si passivated by catalytic-chemical vapor deposited alumina films

Ogita, Yoh-Ichiro, Tachihara, Masayuki

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 581 KB

english, 2015

21

Strategy for silicon based hot-wire chemical vapor deposition without wire silicide formation

Laukart, Artur, Harig, Tino, Höfer, Markus, Schäfer, Lothar

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 503 KB

english, 2015

22

Comparison of metal oxide removal using hydrogen radicals generated by hot-wire and plasma-enhanced methods

Nogita, Kanta, Kamatani, Ryosuke, Tayumoto, Satoru, Izumi, Akira

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 297 KB

english, 2015

23

Degradation of a tantalum filament during the hot-wire CVD of silicon nitride thin films

Oliphant, C.J., Arendse, C.J., Muller, T.F.G., Jordaan, W.A., Knoesen, D.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 1.18 MB

english, 2015

24

The control of the film stress of Cat-CVD a-Si films and its impact on explosive crystallization induced by flash lamp annealing

Ohdaira, Keisuke

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 610 KB

english, 2015

25

Effect of hydrogen on passivation quality of SiNx/Si-rich SiNx stacked layers deposited by catalytic chemical vapor deposition on c-Si wafers

Thi, Trinh Cham, Koyama, Koichi, Ohdaira, Keisuke, Matsumura, Hideki

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 474 KB

english, 2015

26

Seventh international conference on hot-wire CVD (Cat-CVD) process

Bourée, Jean Eric

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 129 KB

english, 2015

27

Permeation barrier performance of Hot Wire-CVD grown silicon-nitride films treated by argon plasma

Majee, S., Cerqueira, M.F., Tondelier, D., Vanel, J.C., Geffroy, B., Bonnassieux, Y., Alpuim, P., Bourée, J.E.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 634 KB

english, 2015