SELECTIVE DRY ETCHING OF GaN OVER AlGaN IN BCL...

International Journal of High Speed Electronics and Systems 2004 / 09 Vol. 14; Iss. 3

SELECTIVE DRY ETCHING OF GaN OVER AlGaN IN BCL 3 /SF 6 MIXTURES

BUTTARI, D., CHINI, A., CHAKRABORTY, A., MCCARTHY, L., XING, H., PALACIOS, T., SHEN, L., KELLER, S., MISHRA, U. K.
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Volume:
14
Language:
english
Journal:
International Journal of High Speed Electronics and Systems
DOI:
10.1142/S012915640400279X
Date:
September, 2004
File:
PDF, 333 KB
english, 2004
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