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Characterization and modeling of nanometric SiO2 dielectrics
C. Leroux, P. Mur, N. Rochat, D. Rouchon, R. Truche, G. Reimbold, G. GhibaudoVolume:
72
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2003.12.049
File:
PDF, 251 KB
english, 2004