X-ray microdiffraction: local stress distributions in polycrystalline and epitaxial thin films
M.A Phillips, R Spolenak, N Tamura, W.L Brown, A.A MacDowell, R.S Celestre, H.A Padmore, B.W Batterman, E Arzt, J.R PatelVolume:
75
Year:
2004
Language:
english
Pages:
10
DOI:
10.1016/j.mee.2003.12.053
File:
PDF, 635 KB
english, 2004