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Electrical characterization of SrTiO3 thin films deposited on Si(0 0 1) substrate by liquid injection MOCVD
J. Legrand, S. Lhostis, Y. Chang, L. Militaru, C. Lamard, A. Sibai, L. Auvray, M. Audier, J.-P. Sénateur, C. Dubourdieu, F. DucroquetVolume:
72
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2004.01.009
File:
PDF, 386 KB
english, 2004