Electrical characterization of SrTiO3 thin films deposited...

Microelectronic Engineering 2004 Vol. 72; Iss. 1-4

Electrical characterization of SrTiO3 thin films deposited on Si(0 0 1) substrate by liquid injection MOCVD

J. Legrand, S. Lhostis, Y. Chang, L. Militaru, C. Lamard, A. Sibai, L. Auvray, M. Audier, J.-P. Sénateur, C. Dubourdieu, F. Ducroquet
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Volume:
72
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2004.01.009
File:
PDF, 386 KB
english, 2004
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