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Focused ion beam lithography for two dimensional array structures for photonic applications
S. Cabrini, A. Carpentiero, R. Kumar, L. Businaro, P. Candeloro, M. Prasciolu, A. Gosparini, C. Andreani, M. De Vittorio, T. Stomeo, E. Di FabrizioVolume:
78-79
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2004.12.006
File:
PDF, 274 KB
english, 2005