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Manufacturable MEMS microcolumn
R. Saini, Z. Jandric, K. Tsui, T. Udeshi, D. TuggleVolume:
78-79
Year:
2005
Language:
english
Pages:
11
DOI:
10.1016/j.mee.2004.12.010
File:
PDF, 326 KB
english, 2005