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A hybrid CMOS–SET co-fabrication platform using nano-grain polysilicon wires
S. Ecoffey, V. Pott, S. Mahapatra, D. Bouvet, P. Fazan, A.M. IonescuVolume:
78-79
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2004.12.033
File:
PDF, 372 KB
english, 2005