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A Si/SiGe MOSFET utilizing low-temperature wafer bonding
S. Koliopoulou, P. Dimitrakis, D. Goustouridis, S. Chatzandroulis, P. Normand, D. Tsoukalas, H. RadamsonVolume:
78-79
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2004.12.034
File:
PDF, 242 KB
english, 2005