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Roughness and damage of a GaAs surface after chemically assisted ion beam etching with Cl2/Ar+
J. Dienelt, K. Zimmer, J. von Sonntag, B. Rauschenbach, C. BundesmannVolume:
78-79
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2004.12.059
File:
PDF, 303 KB
english, 2005