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Correlation of surface roughness with edge roughness in PMMA resist
Shazia Yasin, M.N. Khalid, D.G. Hasko, S. SarfrazVolume:
78-79
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2004.12.062
File:
PDF, 483 KB
english, 2005