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Choice of the molecular weight of an imprint polymer for hot embossing lithography
H. Schulz, M. Wissen, N. Bogdanski, H.-C. Scheer, K. Mattes, Ch. FriedrichVolume:
78-79
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.mee.2004.12.079
File:
PDF, 379 KB
english, 2005