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Replication of sub-40 nm gap nanoelectrodes over an 8-in. substrate by nanoimprint lithography
J. Tallal, D. Peyrade, F. Lazzarino, K. Berton, C. Perret, M. Gordon, C. Gourgon, P. SchiavoneVolume:
78-79
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2004.12.084
File:
PDF, 227 KB
english, 2005