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On the trap generation rate in ultrathin SiON under Constant Voltage Stress
R. Degraeve, B. Kaczer, Ph. Roussel, G. GroesenekenVolume:
80
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2005.04.103
File:
PDF, 215 KB
english, 2005