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Electron back scattered diffraction study of acoustomigration damage in Al/Ti metallization for SAW devices
M. Pekarčı́ková, S. Menzel, H. Wendrock, K. WetzigVolume:
82
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2005.07.070
File:
PDF, 377 KB
english, 2005