Correlation of electromigration defects in small damascene Cu interconnects with their microstructure
Horst Wendrock, Kabir Mirpuri, Siegfried Menzel, Günther Schindler, Klaus WetzigVolume:
82
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2005.07.077
File:
PDF, 231 KB
english, 2005