Study of X-ray lithographic conditions for SU-8 by Fourier transform infrared spectroscopy
D. Wong, T.L. Tan, P. Lee, R.S. Rawat, A. PatranVolume:
83
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2005.12.012
File:
PDF, 232 KB
english, 2006