Study of X-ray lithographic conditions for SU-8 by Fourier...

Study of X-ray lithographic conditions for SU-8 by Fourier transform infrared spectroscopy

D. Wong, T.L. Tan, P. Lee, R.S. Rawat, A. Patran
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Volume:
83
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2005.12.012
File:
PDF, 232 KB
english, 2006
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