EUV multilayer optics

Microelectronic Engineering 2006 Vol. 83; Iss. 4-9

EUV multilayer optics

Torsten Feigl, Sergiy Yulin, Nicolas Benoit, Norbert Kaiser
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Volume:
83
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2005.12.033
File:
PDF, 250 KB
english, 2006
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