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Patterning nanoscale features using the 2-step NERIME nanolithography process
S.F. Gilmartin, K. Arshak, D. Collins, O. Korostynska, A. ArshakVolume:
83
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2006.01.008
File:
PDF, 259 KB
english, 2006